Tabletop extreme ultraviolet reflectometer for quantitative nanoscale reflectometry, scatterometry, and imaging
| Author | |
| Abstract |
Imaging using coherent extreme-ultraviolet (EUV) light provides exceptional capabilities for the characterization of the composition and geometry of nanostructures by probing with high spatial resolution and elemental specificity. We present a multi-modal tabletop EUV imaging reflectometer for high-fidelity metrology of nanostructures. The reflectometer is capable of measurements in three distinct modes: intensity reflectometry, scatterometry, and imaging reflectometry, where each mode addresses different nanostructure characterization challenges. |
| Year of Publication |
2023
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| Journal Title |
Review of Scientific Instruments
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| Volume |
94
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| Issue |
12
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| ISSN Number |
0034-6748, 1089-7623
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| DOI | |
| Download citation | |
| JILA PI | |
Journal Article
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| JILA Topics | |
| Publication Status |
The Physics Frontiers Centers (PFC) program supports university-based centers and institutes where the collective efforts of a larger group of individuals can enable transformational advances in the most promising research areas. The program is designed to foster major breakthroughs at the intellectual frontiers of physics by providing needed resources such as combinations of talents, skills, disciplines, and/or specialized infrastructure, not usually available to individual investigators or small groups, in an environment in which the collective efforts of the larger group can be shown to be seminal to promoting significant progress in the science and the education of students. PFCs also include creative, substantive activities aimed at enhancing education, broadening participation of traditionally underrepresented groups, and outreach to the scientific community and general public.