Annealing reduces Si3N4 microwave-frequency dielectric loss in superconducting resonators
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Abstract |
The dielectric loss of silicon nitride (Si3N4) limits the performance of microwave-frequency devices that rely on this material for sensing, signal processing, and quantum communication. Using superconducting resonant circuits, we measure the cryogenic loss tangent of either as-deposited or high-temperature annealed stoichiometric Si3N4 as a function of drive strength and temperature. |
Year of Publication |
2024
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Date Published |
2024-05
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Journal Title |
Phys. Rev. Applied
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Volume |
21
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Issue |
5
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Start Page or Article ID |
054044
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DOI | |
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