Annealing reduces Si3N4 microwave-frequency dielectric loss in superconducting resonators
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Abstract |
The dielectric loss of silicon nitride (Si3N4) limits the performance of microwave-frequency devices that rely on this material for sensing, signal processing, and quantum communication. Using superconducting resonant circuits, we measure the cryogenic loss tangent of either as-deposited or high-temperature annealed stoichiometric Si3N4 as a function of drive strength and temperature. |
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2023
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Journal Title |
Submitted
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