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The location of very small particles in silane RF discharge
Author
K. Rozsa
G. Bano
Alan Gallagher
Year of Publication
2001
Date Published
Jan-04-2001
Journal Title
IEEE Transactions on Plasma Science
Volume
29
Start Page or Article ID
256-260
ISSN Number
00933813
DOI
10.1109/27.923703
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JILA PI
Alan Gallagher
Journal Article
Publication Status
Published