@article{491,
  author = {K. Rozsa and G. Bano and Alan Gallagher},
  title = {The location of very small particles in silane RF discharge},
  year = {2001},
  journal = {IEEE Transactions on Plasma Science},
  volume = {29},
  pages = {256-260},
  month = {Jan-04-2001},
  issn = {00933813},
  doi = {10.1109/27.923703},
}