TY - JOUR
AU - K. Rozsa
AU - G. Bano
AU - Alan Gallagher
BT - IEEE Transactions on Plasma Science
DA - Jan-04-2001
DO - 10.1109/27.923703
PY - 2001
SP - 256
EP - 260
T2 - IEEE Transactions on Plasma Science
TI - The location of very small particles in silane RF discharge
VL - 29
SN - 00933813
ER -