High-fidelity ptychographic imaging of highly periodic structures enabled by vortex high harmonic beams
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Abstract |
Ptychographic coherent diffractive imaging enables diffraction-limited imaging of nanoscale structures at extreme ultraviolet and x-ray wavelengths, where high-quality image-forming optics are not available. However, its reliance on a set of diverse diffraction patterns makes it challenging to use ptychography to image highly periodic samples, limiting its application to defect inspection for electronic and photonic devices. |
Year of Publication |
2023
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Date Published |
2023-09
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Journal Title |
Optica
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Volume |
10
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Issue |
9
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Start Page or Article ID |
1245
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ISSN Number |
2334-2536
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DOI | |
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