High-fidelity ptychographic imaging of highly periodic structures enabled by vortex high harmonic beams
| Author | |
| Abstract |
Ptychographic coherent diffractive imaging enables diffraction-limited imaging of nanoscale structures at extreme ultraviolet and x-ray wavelengths, where high-quality image-forming optics are not available. However, its reliance on a set of diverse diffraction patterns makes it challenging to use ptychography to image highly periodic samples, limiting its application to defect inspection for electronic and photonic devices. |
| Year of Publication |
2023
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| Date Published |
2023-09
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| Journal Title |
Optica
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| Volume |
10
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| Issue |
9
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| Start Page or Article ID (correct) |
1245
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| ISSN Number |
2334-2536
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| DOI | |
| Download citation | |
| JILA PI | |
Journal Article
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| JILA Topics | |
| Publication Status |
The Physics Frontiers Centers (PFC) program supports university-based centers and institutes where the collective efforts of a larger group of individuals can enable transformational advances in the most promising research areas. The program is designed to foster major breakthroughs at the intellectual frontiers of physics by providing needed resources such as combinations of talents, skills, disciplines, and/or specialized infrastructure, not usually available to individual investigators or small groups, in an environment in which the collective efforts of the larger group can be shown to be seminal to promoting significant progress in the science and the education of students. PFCs also include creative, substantive activities aimed at enhancing education, broadening participation of traditionally underrepresented groups, and outreach to the scientific community and general public.