High-fidelity ptychographic imaging of highly periodic structures enabled by vortex high harmonic beams

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Abstract

Ptychographic coherent diffractive imaging enables diffraction-limited imaging of nanoscale structures at extreme ultraviolet and x-ray wavelengths, where high-quality image-forming optics are not available. However, its reliance on a set of diverse diffraction patterns makes it challenging to use ptychography to image highly periodic samples, limiting its application to defect inspection for electronic and photonic devices.

Year of Publication
2023
Date Published
2023-09
Journal Title
Optica
Volume
10
Issue
9
Start Page or Article ID
1245
ISSN Number
2334-2536
DOI
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