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Production of higher silanes in radio frequency SiH4 and H2-SiH4 plasmas
Author
P. Horvath
K. Rozsa
Alan Gallagher
Year of Publication
2004
Date Published
Jan-01-2004
Journal Title
Journal of Applied Physics
Volume
96
Start Page or Article ID
7660
ISSN Number
00218979
DOI
10.1063/1.1786666
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JILA PI
Alan Gallagher
Journal Article
Publication Status
Published