@article{1279,
  author = {P. Horvath and K. Rozsa and Alan Gallagher},
  title = {Production of higher silanes in radio frequency SiH4 and H2-SiH4 plasmas},
  year = {2004},
  journal = {Journal of Applied Physics},
  volume = {96},
  pages = {7660},
  month = {Jan-01-2004},
  issn = {00218979},
  doi = {10.1063/1.1786666},
}