TY - JOUR
AU - P. Horvath
AU - K. Rozsa
AU - Alan Gallagher
BT - Journal of Applied Physics
DA - Jan-01-2004
DO - 10.1063/1.1786666
PY - 2004
EP - 7660
T2 - Journal of Applied Physics
TI - Production of higher silanes in radio frequency SiH4 and H2-SiH4 plasmas
VL - 96
SN - 00218979
ER -