Saturated defect densities of hydrogenated amorphous silicon grown by hot-wire chemical vapor deposition at rates up to 150 A/s
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Year of Publication |
2001
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Date Published |
Jan-01-2001
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Journal Title |
Applied Physics Letters
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Volume |
78
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Start Page or Article ID |
3788
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ISSN Number |
00036951
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DOI | |
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JILA PI | |
Journal Article
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Publication Status |