@article{557, author = {A. Mahan and Y. Xu and B. Nelson and R. Crandall and J. Cohen and K. Palinginis and Alan Gallagher}, title = {Saturated defect densities of hydrogenated amorphous silicon grown by hot-wire chemical vapor deposition at rates up to 150 A/s}, year = {2001}, journal = {Applied Physics Letters}, volume = {78}, pages = {3788}, month = {Jan-01-2001}, issn = {00036951}, doi = {10.1063/1.1375008}, }