Plasma chemistry in silane/germane and disilane/germane mixtures
Author | |
Year of Publication |
1992
|
Date Published |
Jan-01-1992
|
Journal Title |
Journal of Applied Physics
|
Volume |
71
|
Start Page or Article ID (correct) |
4727
|
ISSN Number |
00218979
|
DOI | |
Download citation | |
JILA PI | |
Journal Article
|
|
Publication Status |