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Plasma chemistry in disilane discharges
Author
John Doyle
D. Doughty
Alan Gallagher
Year of Publication
1992
Date Published
Jan-01-1992
Journal Title
Journal of Applied Physics
Volume
71
Start Page or Article ID
4771
ISSN Number
00218979
DOI
10.1063/1.350669
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JILA PI
Alan Gallagher
Journal Article
Publication Status
Published