A critical evaluation of low-energy electron impact cross sections for plasma processing modeling. I: Cl2, F2, and HCl
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Year of Publication |
1992
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Date Published |
Jan-12-1992
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Journal Title |
Plasma Chemistry and Plasma Processing
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Volume |
12
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Start Page or Article ID |
449-476
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ISSN Number |
0272-4324
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DOI | |
URL | |
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Journal Article
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