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Germane discharge chemistry
Author
John Doyle
D. Doughty
Alan Gallagher
Year of Publication
1991
Date Published
Jan-01-1991
Journal Title
Journal of Applied Physics
Volume
69
Start Page or Article ID
4169
ISSN Number
00218979
DOI
10.1063/1.348384
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JILA PI
Alan Gallagher
Journal Article
Publication Status
Published