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Silane dissociation products in deposition discharges
Author
John Doyle
D. Doughty
Alan Gallagher
Year of Publication
1990
Date Published
Jan-01-1990
Journal Title
Journal of Applied Physics
Volume
68
Start Page or Article ID
4375
ISSN Number
00218979
DOI
10.1063/1.346186
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JILA PI
Alan Gallagher
Journal Article
Publication Status
Published