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Causes of SiH4 dissociation in silane dc discharges
Author
D. Doughty
Alan Gallagher
Year of Publication
1990
Date Published
Jan-11-1990
Journal Title
Physical Review A
Volume
42
Start Page or Article ID
6166-6170
ISSN Number
1050-2947
DOI
10.1103/PhysRevA.42.6166
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JILA PI
Alan Gallagher
Journal Article
Publication Status
Published