Skip to main content
Search
Search
Polysilane production in RF SiH4 and H2-SiH4 plasmas
Author
P. Horvath
K. Rozsa
Alan Gallagher
Year of Publication
2003
URL
http://www.icpig.uni-greifswald.de/proceedings/data/Horvath_1
Download citation
Google Scholar
BibTeX
RIS
Related Articles
Conference Paper
Associated Institutes
JILA PI
Alan Gallagher
Group Name & Research Topics
Authored by
kdcadmin