@conference{1042,
  author = {P. Horvath and K. Rozsa and Alan Gallagher},
  title = {Polysilane production in RF SiH4 and H2-SiH4 plasmas},
  year = {2003},
  url = {http://www.icpig.uni-greifswald.de/proceedings/data/Horvath_1},
  note = {JILA Pub. 7090},
}