TY - CPAPER
AU - P. Horvath
AU - K. Rozsa
AU - Alan Gallagher
N1 - JILA Pub. 7090
PY - 2003
TI - Polysilane production in RF SiH4 and H2-SiH4 plasmas
UR - http://www.icpig.uni-greifswald.de/proceedings/data/Horvath_1
ER -