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Neutral radical deposition from silane discharges
Author
Alan Gallagher
Year of Publication
1988
Date Published
Jan-01-1988
Journal Title
Journal of Applied Physics
Volume
63
Start Page or Article ID
2406
ISSN Number
00218979
DOI
10.1063/1.341034
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JILA PI
Alan Gallagher
Journal Article
Publication Status
Published