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Mono- and disilicon radicals in silane and silane-argon dc discharges
Author
R. Robertson
Alan Gallagher
Year of Publication
1986
Date Published
Jan-01-1986
Journal Title
Journal of Applied Physics
Volume
59
Start Page or Article ID
3402
ISSN Number
00218979
DOI
10.1063/1.336806
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JILA PI
Alan Gallagher
Journal Article
Publication Status
Published