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Amorphous silicon deposition rates in diode and triode discharges
Author
Alan Gallagher
Year of Publication
1986
Date Published
Jan-01-1986
Journal Title
Journal of Applied Physics
Volume
60
Start Page or Article ID
1369
ISSN Number
00218979
DOI
10.1063/1.337312
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JILA PI
Alan Gallagher
Journal Article
Publication Status
Published