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Ion chemistry in silane dc discharges
Author
H. Chatham
Alan Gallagher
Year of Publication
1985
Date Published
Jan-01-1985
Journal Title
Journal of Applied Physics
Volume
58
Start Page or Article ID
159
ISSN Number
00218979
DOI
10.1063/1.335702
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JILA PI
Alan Gallagher
Journal Article
Publication Status
Published