Optomechanical uncooled infrared imaging system: design, microfabrication, and performance
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Year of Publication |
2002
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Date Published |
Jan-04-2002
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Journal Title |
Journal of Microelectromechanical Systems
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Volume |
11
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Start Page or Article ID |
136-146
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ISSN Number |
10577157
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DOI | |
URL | |
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Journal Article
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Publication Status |