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Radical species in argon-silane discharges
Author
R. Robertson
D. Hils
H. Chatham
Alan Gallagher
Year of Publication
1983
Date Published
Jan-01-1983
Journal Title
Applied Physics Letters
Volume
43
Start Page or Article ID
544
ISSN Number
00036951
DOI
10.1063/1.94413
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JILA PI
Alan Gallagher
Journal Article
Publication Status
Published