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Analysis of Plasma Properties and Deposition of Amorphous Silicon Alloy Solar Cells Using Very High Frequency Glow Discharge
Author
B. Yan
J. Yang
S. Guha
Alan Gallagher
Year of Publication
1999
Date Published
Jan-01-1999
Journal Title
MRS Proceedings
Volume
557
DOI
10.1557/PROC-557-115
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JILA PI
Alan Gallagher
Journal Article
Publication Status
Published