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Anion reactions in silane plasma
Author
Alan Gallagher
A. Howling
Ch. Hollenstein
Year of Publication
2002
Date Published
Jan-01-2002
Journal Title
Journal of Applied Physics
Volume
91
Start Page or Article ID
5571
ISSN Number
00218979
DOI
10.1063/1.1459758
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JILA PI
Alan Gallagher
Journal Article
Publication Status
Published