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Particle accumulation in a flowing silane discharge
Author
B. Jelenković
Alan Gallagher
Year of Publication
1997
Date Published
Jan-01-1997
Journal Title
Journal of Applied Physics
Volume
82
Start Page or Article ID
1546
ISSN Number
00218979
DOI
10.1063/1.365955
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JILA PI
Alan Gallagher
Journal Article
Publication Status
Published