Mechanisms influencing \textquotedbllefthot-wire\textquotedblright deposition of hydrogenated amorphous silicon
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Year of Publication |
1997
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Date Published |
Jan-01-1997
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Journal Title |
Journal of Applied Physics
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Volume |
82
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Start Page or Article ID |
1909
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ISSN Number |
00218979
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DOI | |
Download citation | |
JILA PI | |
Journal Article
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Publication Status |