Nanoparticle deposition in hydrogenated amorphous silicon films during rf plasma deposition
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Year of Publication |
1996
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Date Published |
Jan-01-1996
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Journal Title |
Applied Physics Letters
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Volume |
68
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Start Page or Article ID |
1705
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ISSN Number |
00036951
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DOI | |
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JILA PI | |
Journal Article
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Publication Status |