Film quality in relation to deposition conditions of a-SI:H films deposited by the \textquoteleft\textquotelefthot wire\textquoteright\textquoteright method using highly diluted silane
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Year of Publication |
1996
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Date Published |
Jan-01-1996
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Journal Title |
Journal of Applied Physics
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Volume |
79
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Start Page or Article ID |
7278
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ISSN Number |
00218979
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DOI | |
Download citation | |
JILA PI | |
Journal Article
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Publication Status |