Two-dimensional model of a capacitively coupled rf discharge and comparisons with experiments in the Gaseous Electronics Conference reference reactor
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Year of Publication |
1995
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Date Published |
Jan-02-1995
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Journal Title |
Physical Review E
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Volume |
51
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Start Page or Article ID |
1376-1390
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ISSN Number |
1063-651X
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DOI | |
URL | |
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Publication Status |