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Kinetic-Energy-Enhanced Neutral Etching
Author
Stephen Leone
Year of Publication
1995
Date Published
Jun-04-1997
Journal Title
Japanese Journal of Applied Physics
Volume
34
Start Page or Article ID
2073-2082
ISSN Number
0021-4922
DOI
10.1143/JJAP.34.2073
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JILA PI
Stephen Leone
Journal Article
Publication Status
Published