Chemical mapping of patterned polymer photoresists by near-field infrared microscopy
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Year of Publication |
2001
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Date Published |
Jan-05-2001
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Journal Title |
Applied Surface Science
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Volume |
175-176
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Start Page or Article ID |
783-789
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ISSN Number |
01694332
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DOI | |
Download citation | |
JILA PI | |
Journal Article
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Publication Status |