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Small particle growth in silane radio-frequency discharges
Author
M. Childs
Alan Gallagher
Year of Publication
2000
Date Published
Jan-01-2000
Journal Title
Journal of Applied Physics
Volume
87
Start Page or Article ID
1076
ISSN Number
00218979
DOI
10.1063/1.371982
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JILA PI
Alan Gallagher
Journal Article
Publication Status
Published