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Model of particle growth in silane discharges
Author
Alan Gallagher
Year of Publication
2000
Date Published
Jan-08-2000
Journal Title
Physical Review E
Volume
62
Start Page or Article ID
2690-2706
ISSN Number
1063-651X
DOI
10.1103/PhysRevE.62.2690
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JILA PI
Alan Gallagher
Journal Article
Publication Status
Published