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Surface radicals in silane/hydrogen discharges
Author
P. Horvath
Alan Gallagher
Year of Publication
2009
Date Published
01/2009
Journal Title
Journal of Applied Physics
Volume
105
Start Page or Article ID
013304
ISSN Number
00218979
DOI
10.1063/1.3050331
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JILA PI
Alan Gallagher
Journal Article
Publication Status
Published