Radical species involved in hotwire (catalytic) deposition of hydrogenated amorphous silicon

Author	W. Zheng Alan Gallagher
Year of Publication	2008
Date Published	Jan-01-2008
Journal Title	Thin Solid Films
Volume	516
Start Page or Article ID	929-939
ISSN Number	00406090
DOI	10.1016/j.tsf.2007.05.002
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JILA PI	Alan Gallagher
	Journal Article
Publication Status	Published

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