Structural and Elastic Properties of Empty-Pore Metalattices Extracted via Nondestructive Coherent Extreme UV Scatterometry and Electron Tomography

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Abstract

Semiconductor metalattices consisting of a linked network of three-dimensional nanostructures with periodicities on a length scale <100 nm can enable tailored functional properties due to their complex nanostructuring. For example, by controlling both the porosity and pore size, thermal transport in these phononic metalattices can be tuned, making them promising candidates for efficient thermoelectrics or thermal rectifiers.

Year of Publication
2022
Date Published
2022-09
Journal Title
ACS Applied Materials & Interfaces
Volume
14
Issue
36
Start Page or Article ID
41316–41327
ISBN Number
1944-8244
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