Abstract:
Future electronic and quantum devices will require near-atomically-precise nanofabrication processes, but present plasma processing methods create a variety of imperfections that limit device performance. In this talk, I will present atomic layer etching processing for materials including superconducting titanium nitride, lithium niobate, and compound semiconductors which enable etching with Angstrom-scale precision. I will also describe our efforts to validate the process improvements at the device level.
Bio:
Austin Minnich is Deputy Chair of the Division of Engineering and Applied Science and a Professor of Mechanical Engineering and Applied Physics at the California Institute of Technology. He received his Bachelor’s degree from UC Berkeley in 2006 and his PhD from MIT in 2011, after which he started his position at Caltech. He is the recipient of a 2013 NSF CAREER Award, a 2015 ONR Young Investigator Award, a 2017 Director of Research Award from the Navy, the 2017 Junior Prize from the International Photothermal and Photoacoustics Association, the 2017 Bergles-Rohsenow Young Investigator Award, and a 2019 Presidential Early Career Award for Scientists and Engineers (PECASE).
The Physics Frontiers Centers (PFC) program supports university-based centers and institutes where the collective efforts of a larger group of individuals can enable transformational advances in the most promising research areas. The program is designed to foster major breakthroughs at the intellectual frontiers of physics by providing needed resources such as combinations of talents, skills, disciplines, and/or specialized infrastructure, not usually available to individual investigators or small groups, in an environment in which the collective efforts of the larger group can be shown to be seminal to promoting significant progress in the science and the education of students. PFCs also include creative, substantive activities aimed at enhancing education, broadening participation of traditionally underrepresented groups, and outreach to the scientific community and general public.