Ultrahigh 22-nm resolution EUV coherent diffraction imaging using a tabletop 13-nm high harmonic source

Author
Year of Publication
2012
Conference Name
SPIE
Date Published
2012-01
Publisher
SPIE
Conference Location
San Jose, California
URL
http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1311014
DOI
10.1117/12.916524
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