Ultrahigh 22-nm resolution EUV coherent diffraction imaging using a tabletop 13-nm high harmonic source
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Year of Publication |
2012
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Conference Name |
SPIE
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Date Published |
2012-01
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Publisher |
SPIE
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Conference Location |
San Jose, California
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URL |
http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1311014
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DOI |
10.1117/12.916524
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