TY - CPAPER
AU - Dennis Gardner
AU - Elisabeth Shanblatt
AU - Michael Tanksalvala
AU - Xiaoshi Zhang
AU - Benjamin Galloway
AU - Christina Porter
AU - Robert Karl
AU - Charles Bevis
AU - Bosheng Zhang
AU - Matthew Seaberg
AU - Giulia Mancini
AU - Daniel Adams
AU - Henry Kapteyn
AU - Margaret Murnane
AB - <p>By combining tabletop 13.5nm high-harmonic EUV beams with novel ptychography reconstruction algorithms, we demonstrate diffraction-limit high-NA and sub-wavelength resolution imaging at EUV wavelengths for the first time, representing a record resolution for full-field lightbased microscopy</p>
BT - unknown
DA - 2017-09
DO - 10.1364/LS.2017.LM3F.4
N2 - <p>By combining tabletop 13.5nm high-harmonic EUV beams with novel ptychography reconstruction algorithms, we demonstrate diffraction-limit high-NA and sub-wavelength resolution imaging at EUV wavelengths for the first time, representing a record resolution for full-field lightbased microscopy</p>
PY - 2017
T2 - unknown
TI - First Demonstration of Sub-Wavelength Imaging at Short Wavelengths
UR - https://www.osapublishing.org/abstract.cfm?URI=LS-2017-LM3F.4
ER -