TY - CPAPER
AU - Bosheng Zhang
AU - D. Adams
AU - Matthew Seaberg
AU - Dennis Gardner
AU - Elisabeth Shanblatt
AU - Henry Kapteyn
AU - Margaret Murnane
BT - unknown
CY - San Jose, California, USA
DA - 2014-01
DO - 10.1117/12.2046526
PB - SPIE
PP - San Jose, California, USA
PY - 2014
T2 - unknown
TI - Quantitative tabletop coherent diffraction imaging microscope for EUV lithography mask inspection
UR - http://proceedings.spiedigitallibrary.org/proceeding.aspx?doi=10.1117/12.2046526
ER -