TY - JOUR
KW - pfc
AU - P.-L. Yu
AU - T. Purdy
AU - Cindy Regal
BT - Physical Review Letters
DA - 2012-02
DO - 10.1103/PhysRevLett.108.083603
PY - 2012
SE - 083603
SP - 083603/1
EP - 5
T2 - Physical Review Letters
TI - Control of Material Damping in High-Q Membrane Microresonators
UR - http://link.aps.org/doi/10.1103/PhysRevLett.108.083603
VL - 108
ER -