TY - JOUR AU - T. Purdy AU - R. Peterson AU - P.-L. Yu AU - Cindy Regal BT - New Journal of Physics DA - 2012-11 DO - 10.1088/1367-2630/14/11/115021 PY - 2012 EP - 115021 T2 - New Journal of Physics TI - Cavity optomechanics with Si3N4 membranes at cryogenic temperatures UR - http://stacks.iop.org/1367-2630/14/i=11/a=115021?key=crossref.11356b3176442bddf1dcc4ae5ae5b3b0 VL - 14 ER -