TY - JOUR KW - pfc AU - D. Yost AU - Arman Cingöz AU - T. Allison AU - A. Ruehl AU - Martin Fermann AU - I. Hartl AU - Jun Ye AB - We address technical impediments to the generation of high-photon flux XUV frequency combs through cavity-enhanced high harmonic generation. These difficulties arise from mirror damage, cavity nonlinearity, the intracavity plasma generated during the HHG process, and imperfect phase-matching. By eliminating or minimizing each of these effects we have developed a system capable of generating > 200 μW and delivering ~20 μW of average power for each spectrally BT - Optics Express DA - 2011-11 DO - 10.1364/OE.19.023483 N2 - We address technical impediments to the generation of high-photon flux XUV frequency combs through cavity-enhanced high harmonic generation. These difficulties arise from mirror damage, cavity nonlinearity, the intracavity plasma generated during the HHG process, and imperfect phase-matching. By eliminating or minimizing each of these effects we have developed a system capable of generating > 200 μW and delivering ~20 μW of average power for each spectrally PY - 2011 EP - 23483 T2 - Optics Express TI - Power optimization of XUV frequency combs for spectroscopy applications [Invited] VL - 19 SN - 1094-4087 ER -