TY - JOUR
AU - Yuka Esashi
AU - Nicholas Jenkins
AU - Y. Shao
AU - Justin Shaw
AU - S. Park
AU - Margaret Murnane
AU - Henry Kapteyn
AU - Michael Tanksalvala
BT - Review of Scientific Instruments (In Press)
PY - 2023
T2 - Review of Scientific Instruments (In Press)
TI - Tabletop Extreme Ultraviolet Reflectometer for Quantitative Nanoscale Reflectometry, Scatterometry, and Imaging
ER -