TY - JOUR AU - Ran Fischer AU - D McNally AU - Chris Reetz AU - Gabriel Assumpção AU - T. Knief AU - Y Lin AU - Cindy Regal AB - We explore the prospects and benefits of combining the techniques of cavity optomechanics with efforts to image spins using magnetic resonance force microscopy (MRFM). In particular, we focus on a common mechanical resonator used in cavity optomechanics—high-stress stoichiometric silicon nitride (Si3N4) membranes. We present experimental work with a 'trampoline' membrane resonator that has a quality factor above 106 and an order of magnitude lower mass than a comparable standard membrane resonators. Such high-stress resonators are on a trajectory to reach 0.1 aN / √Hz force sensitivities at MHz frequencies by using techniques such as soft clamping and phononic-crystal control of acoustic radiation in combination with cryogenic cooling. We present a demonstration of force-detected electron spin resonance of an ensemble at room temperature using the trampoline resonators functionalized with a magnetic grain. We discuss prospects for combining such a resonator with an integrated Fabry–Perot cavity readout at cryogenic temperatures, and provide ideas for future impacts of membrane cavity optomechanical devices on MRFM of nuclear spins. BT - New Journal of Physics DA - 2019-04 DO - 10.1088/1367-2630/ab117a N2 - We explore the prospects and benefits of combining the techniques of cavity optomechanics with efforts to image spins using magnetic resonance force microscopy (MRFM). In particular, we focus on a common mechanical resonator used in cavity optomechanics—high-stress stoichiometric silicon nitride (Si3N4) membranes. We present experimental work with a 'trampoline' membrane resonator that has a quality factor above 106 and an order of magnitude lower mass than a comparable standard membrane resonators. Such high-stress resonators are on a trajectory to reach 0.1 aN / √Hz force sensitivities at MHz frequencies by using techniques such as soft clamping and phononic-crystal control of acoustic radiation in combination with cryogenic cooling. We present a demonstration of force-detected electron spin resonance of an ensemble at room temperature using the trampoline resonators functionalized with a magnetic grain. We discuss prospects for combining such a resonator with an integrated Fabry–Perot cavity readout at cryogenic temperatures, and provide ideas for future impacts of membrane cavity optomechanical devices on MRFM of nuclear spins. PY - 2019 EP - 043049 T2 - New Journal of Physics TI - Spin detection with a micromechanical trampoline: towards magnetic resonance microscopy harnessing cavity optomechanics UR - https://iopscience.iop.org/article/10.1088/1367-2630/ab117a/meta VL - 21 ER -