@conference{3472,
  author = {Bosheng Zhang and D. Adams and Matthew Seaberg and Dennis Gardner and Elisabeth Shanblatt and Henry Kapteyn and Margaret Murnane},
  title = {Quantitative tabletop coherent diffraction imaging microscope for EUV lithography mask inspection},
  year = {2014},
  journal = {unknown},
  month = {2014-01},
  publisher = {SPIE},
  address = {San Jose, California, USA},
  url = {http://proceedings.spiedigitallibrary.org/proceeding.aspx?doi=10.1117/12.2046526},
  doi = {10.1117/12.2046526},
}